Documents / Brooks 5850TR-MFC manual
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Title
Brooks 5850TR-MFC manual
Description
1-1 PURPOSE
The Brooks Model 5850TR mass flowmeter / mass flow controller is a mass flow measuring device, designed for accurately measuring and rapidly controlling flows of gases.
1-2 DESCRIPTION
The Brooks Model 5850TR mass flow controller (M.F.C.) provides ”state-of-the-art”mass flow measurement and P.l. control. The Brooks Model 5850TR M.F.C. is used widely in the semiconductor industry as well as many others, where manual, electronic or computer controlled gas handling occurs.
The Model 5850TR consists of three basic units: a flow sensor, a control valve and an integrated electronic control system.
This combination produces a stable gasflow, selectable overshoot protection and eliminates the need for continuous monitoring and re-adjustment of gas pressures.
The Brooks Model 5850TR mass flowmeter / mass flow controller is a mass flow measuring device, designed for accurately measuring and rapidly controlling flows of gases.
1-2 DESCRIPTION
The Brooks Model 5850TR mass flow controller (M.F.C.) provides ”state-of-the-art”mass flow measurement and P.l. control. The Brooks Model 5850TR M.F.C. is used widely in the semiconductor industry as well as many others, where manual, electronic or computer controlled gas handling occurs.
The Model 5850TR consists of three basic units: a flow sensor, a control valve and an integrated electronic control system.
This combination produces a stable gasflow, selectable overshoot protection and eliminates the need for continuous monitoring and re-adjustment of gas pressures.
Version
1.0
Size
1.02 MB
File
Brooks_5850TR-MFC_manual.pdf
Mime
application/pdf
Checksum
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